Zero breakthrough in domestic equipment! Domestic pre coating and developing equipment will enter the OCF international supply chain for the first time!

2024-06-12

Zero breakthrough in domestic equipment! Domestic pre coating

and developing equipment will enter the OCF international supply chain for the first time!

According to SISPARK, on June 6th, the Suzhou International Science and Technology Park (SISPARK) project - Xinda Semiconductor Equipment (Suzhou) Co., Ltd. (referred to as "Xinda Semiconductor") and Jilin Qiushi Spectral Data Technology Co., Ltd. (referred to as "Qiushi Spectral") signed a cooperation agreement. After the two parties reached a cooperation on the supply chain relationship, the domestically produced front-end coating and development equipment will enter the OCF international supply chain for the first time, marking a "zero breakthrough" in the localization of visualization chip color photoresist coating process equipment.

The pre coating and developing equipment, also known as TRACK equipment, refers to a device used in conjunction with a lithography machine in the photolithography process to complete operations such as coating, spraying, baking, and developing. The pre coating and developing equipment can meet high-level process requirements and is usually used in the wafer manufacturing process.

Xinda Semiconductor is a semiconductor equipment manufacturer that settled in the park in 2021. It is committed to the research and development and manufacturing of coating and developing equipment for semiconductor front-end processes. Its main products are coating and developing machines (tracks) for semiconductor lithography processes.

SISPARK has announced that the core R&D team of Xinda Semiconductor has over 20 years of professional experience. Currently, the products, from the overall architecture of the coating and developing machine to the unit components, have been fully localized and can replace imported products with foreign photolithography processes above 28nm. The company plans to complete the research and development, production, testing, and sales of 14-28nm equipment within the next three years, with a total R&D investment expected to exceed 100 million yuan within five years. Xinda Semiconductor has laid a solid foundation for the breakthrough of domestic photolithography technology, especially for further breakthroughs in photoresist.

According to the official website of Qiushi Spectroscopy, the company was established in May 2017 and is a high-tech enterprise engaged in the design of spectral imaging chips and the research and development of application solutions in various fields, as well as the construction of spectral big data. The founding team mainly comes from Changchun University of Science and Technology, and has accumulated more than 20 years of experience in the field of spectroscopy technology and applications. The core team has been dedicated to research and development for decades, proposing a new imaging spectroscopy chip technology architecture system, and completing chip fabrication, packaging, and testing.